| 摘要 |
PURPOSE:To provide an ultrasonic-wave microscope apparatus, which can withstand vibration and can realize the minute scanning in the axial (Z axis) direction in high accuracy. CONSTITUTION:The ultrasonic wave, which is generated with an ultrasonic-wave transmitting means, is focused with an acoustic lens and converted into the focused ultrasonic wave, which is applied on a sample. Thus, the information of the sample is obtained basing on the ultrasonic wave in this ultrasonic-wave microscope apparatus. In this apparatus, a rod 3 is supported in a cantilever pattern so that the rod can be moved in the axial direction with a rod supporting mechanism comprising parallel springs 4a and 4b. An acoustic lens 6, which focuses the ultrasonic wave and transmits the ultrasonic wave on the sample at the specified position, is held at the tip end side of the rod 3. Bellows 2, which are expanded and contracted by the change in internal pressure, are attached to the rod as a driving source for the movement in the axial direction. Means 9, 10, 11a and 11b, which can vary the internal pressure of the driving source are provided. The rod is moved by the displacement amount caused by the expansion and the contraction of the driving source. The facing distance between the acoustic lens and the sample can be varied in this constitution. |
