| 摘要 |
PURPOSE:To reduce a resistance of a light-transmitting conductive oxide film without sacrificing its transmissivity and obtain an optimum unevenness pattern on the film surface by a method wherein an energy beam is applied to the light-transmitting conductive oxide film to increase a carrier concentration in the film. CONSTITUTION:A light-transmitting conductive oxide film 62' made of tin oxide or the like is formed on a substrate 61. Then an XeCl excimer laser beam 63 is applied to the light-transmitting conductive oxide film 62' with an energy of 400mJ/cm<2>. With this process, the light-transmitting conductive oxide film 62' is reformed and its resistance is reduced and, further, a gentle unevenness is formed on the film surface. Then a photoelectric conversion layer 64 is applied to the reformed light-transmitting conductive oxide film 62 and a rear side electrode film 65 is formed on the layer 64. With this constitution, the resistance of the light-transmitting conductive oxide film in a photosensor is reduced by the application of the energy beam and the DC resistance of the photosensor is reduced, so that the photoelectric conversion efficiency of the photosensor can be improved substantially. |
