发明名称 ALKALI-DEVELOPABLE PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To enable an aqueous solution of alkali containing substantially no organic solvent to be used for development by incorporating an alkali-soluble copolymer made from a specified monomer and as structural units, and a cation- photogenerator. CONSTITUTION:This composition contains the cation-photogenerator and the alkali-soluble copolymer made from the monomer represented by formula I or II, and the monomer represented by formula III. In formulae I-II, each of R1 and R2 is H or CH3. The monomer of formula I is embodied by N-(4- hydroxyphenyl)-maleimide and the like, that of formula II is embodied by N-(hydroxyphenyl)-methacrylimide and the like, and that of formula III is embodied by glycidyl metyhacrylate and the like. It is preferred that the amount of the monomer of formula I or II to be used for forming the copolymer is 10-80weight% of the copolymer and that of formula III is 20-90weight% of the copolymer.
申请公布号 JPH06138658(A) 申请公布日期 1994.05.20
申请号 JP19910115611 申请日期 1991.04.19
申请人 OKAMOTO KAGAKU KOGYO KK 发明人 NAKATSUKA MASAO
分类号 G03F7/004;G03F7/00;G03F7/027;G03F7/028;G03F7/033;G03F7/038;H01L21/027;(IPC1-7):G03F7/038 主分类号 G03F7/004
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