| 摘要 |
PURPOSE:To provided a laminated silicon element whose electrical resistance can be reduced and whose silicon film is hardly peeled off. CONSTITUTION:A laminated silicon element 20 is composed of a sheet-type carbon fiber woven cloth 21 which does not have small holes over its whole area, an SiC intermediate film 22 which is formed over the whole surface of the woven cloth 21 and a polycrystalline silicon film 23 which is formed over the whole surface of the film 22. As the woven cloth 21 does not have small holes over its whole area, an electrical resistance can be reduced and, further, the film stress of the polycrystalline silicon film 23 can be reduced by the effect of the intermediate film 22. Moreover, an ohmic junction between the woven cloth 21 and the polycrystalline silicon film 23 can be formed by the effect of the intermediate film 22. Therefore, if the laminated silicon element 20 is applied to a solar cell, etc., its photoelectric conversion efficiency can be improved and, further, as the silicon film is hardly peeled off, its physical strength can be also improved and an ohmic junction between the silicon layer and an rear electrode can be also formed. |
