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发明名称
SURFACE TREATMENT METHOD
摘要
申请公布号
JPH06140388(A)
申请公布日期
1994.05.20
申请号
JP19920290576
申请日期
1992.10.28
申请人
TOSHIBA CORP
发明人
SAKAI TAKAYUKI;SUGURO KYOICHI
分类号
H01L21/302;H01L21/3065;H01L21/316;(IPC1-7):H01L21/316
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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