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发明名称
METHOD OF FORMING TIN FILM
摘要
申请公布号
JPH06140360(A)
申请公布日期
1994.05.20
申请号
JP19920288903
申请日期
1992.10.27
申请人
OKI ELECTRIC IND CO LTD
发明人
HARADA YUSUKE
分类号
C23C16/34;C23C16/455;C23C16/511;H01L21/28;H01L21/285;H01L21/31;H01L21/3205;(IPC1-7):H01L21/285;H01L21/320
主分类号
C23C16/34
代理机构
代理人
主权项
地址
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