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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06140592(A)
申请公布日期
1994.05.20
申请号
JP19920288527
申请日期
1992.10.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
AGATA MASASHI;YAMADA TOSHIRO
分类号
H01L21/822;H01L27/04;H01L27/10;(IPC1-7):H01L27/10
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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