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发明名称
FILM FORMING DEVICE
摘要
申请公布号
JPH06140344(A)
申请公布日期
1994.05.20
申请号
JP19920291445
申请日期
1992.10.29
申请人
SUMITOMO METAL IND LTD
发明人
AKAHORI TAKASHI
分类号
H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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