发明名称 WIRE BONDING DEVICE
摘要 PURPOSE:To prevent coming off of a wire rod from a capillary due to non- generation of discharge from a discharge electrode. CONSTITUTION:When a discharge detecting device 22 detects non-generation of arc discharge, a controller 14a controls a clamper 14 to clamp a wire rod 19. Since the coming off of the wire rod 19 from a capillary 19 can be prevented when a discharge electrode 20 does not generate arc discharge in such a way, the frequency of the passing work of the wire rod 19 through the capillary 11 can be reduced. Therefore, the availability of a wire bonding device and efficiency of the wire bonding work of the device can be improved.
申请公布号 JPH06140458(A) 申请公布日期 1994.05.20
申请号 JP19920311347 申请日期 1992.10.27
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 MURAMOTO AKINOBU
分类号 H01L21/60 主分类号 H01L21/60
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