MASK AND MANUFACTURE THEREOF

摘要

PURPOSE: To provide a transmissive mask to be used in the laser abrasion of the surface of a material having sufficient and mechanical stability for forming an image with high precision and high quality. CONSTITUTION: The mask 1 includes a proper substrate 2 on which multi-layered dielectric 7 operated as reflection coating for a colliding excimer laser radiation is formed. The transparent area of the mask 1 is generated by the through-hole 5 of the mask 1. The through-hole 5 is formed by an against the mask 1 is generated so that the scattering of radiation beams from the side wall part of the through-hole 5 is restricted to min.