发明名称 PICKUP DEVICE
摘要 <p>PURPOSE:To obtain a pickup device which can automatically detect the abnormality of needles, such as the breakage, etc., by proving needle shape inspecting devices which inspect the needles for shape. CONSTITUTION:In this pickup device 10 provided with a table 11 which holds an adhesive sheet 3 to which numerous pieces of small articles 2 are stuck and needles 13 which release the articles 2 from the sheet 3 by pushing the articles 2 from the rear side of the sheet 3, needle shape inspecting devices 16 and 17 which inspects the needles 13 for shape are provided. For example, reflection type photosensors 16 are provided on the upper-side with retreating position of a needle unit 12 as front shape inspecting devices for inspecting the front ends of the needles 13 for their shapes. In addition, sensors 17 respectively composed of a plurality of reflection type photosensors 18 are also provided as whole shape inspecting devices for inspecting almost whole bodies of the needles 13 protruded from the needle unit 12 for their shapes and states.</p>
申请公布号 JPH06140497(A) 申请公布日期 1994.05.20
申请号 JP19920311346 申请日期 1992.10.27
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 SHIMIZU MASARU
分类号 H01L21/52;H01L21/301;H01L21/67;H01L21/68;H01L21/78;(IPC1-7):H01L21/68 主分类号 H01L21/52
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