发明名称 OUTPUT CONTROL DEVICE OF EXCIMER LASER SYSTEM
摘要 PURPOSE:To remove influences of spiking phenomenon to improve precision in exposing amount control in an excimer laser system operating in a burst mode. CONSTITUTION:For detecting various parameters influencing spiking phenomenon, an electrode temperature sensor 13 is disposed in a discharge electrode 12a, and a gas temperature sensor 14 and an HF sensor for monitoring HF concentration are disposed in a laser chamber 15. An output control part 6 for receiving signals derived from each sensor, an output monitor 5, a gas control part 7 for controlling laser gas, and a stepper control part 6, and for adding voltage data to a laser power source 8 is provided. The output control part 6 receives signals of various parameters, and operates a magnitude of a discharge voltage in response to each pulse based on values of parameters so that energy of each pulse may become the same magnitude, and sends voltage data to the laser source to change a discharge voltage, and removes influences of spiking phenomenon to obtain desired pulse energy, in order to improve precision in exposing amount control.
申请公布号 JPH06140695(A) 申请公布日期 1994.05.20
申请号 JP19930019220 申请日期 1993.01.12
申请人 KOMATSU LTD 发明人 AMADA YOSHIO;WAKABAYASHI OSAMU;ITOU NORIAKI
分类号 H01S3/134;H01L21/027;H01S3/032;H01S3/036;(IPC1-7):H01S3/036 主分类号 H01S3/134
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