| 摘要 |
PURPOSE:To provide the photoelectron element of a structure to obviate the generation of a disconnection even if wirings are connected to the electron element on a substrate through an aperture provided in an optical waveguide layer consisting of thick many layered films. CONSTITUTION:This photoelectron element has the optical waveguide 50 consisting of the laminated layers of plural films, the electron element 20 provided in proximity to one surface of this optical waveguide 50 and the wirings 40 connected to the electron element 20 through the aperture 611 (612, 613) provided in a part of the optical waveguide 50. The aperture 611 (612, 613) in the respective film layers 51, 52, 53 of the optical waveguide 50 is formed to a shape gradually expanding the opening from one surface toward the other surface of the optical waveguide 50 provided with the electron element 20 in proximity thereto in at least the part where the wirings 40 are formed. |
