摘要 |
PURPOSE:To realize excellent heat dissipation and to prevent a module constituent from being damaged by temperature change by forming a main constituent component of ceramics of the same material having high heat conductivity. CONSTITUTION:Ceramic spacers 30-1, 30-2, piece modules 20-1, 20-2, 20-3, a ceramic cap 30-T, and a ceramic edge face board 35 are formed of the same material as ceramic multilayer substrates 21-1, 21-2, 21-3. The ceramic spacer 30-1 is interposed in a side edge of the piece module 20-1 and the piece module 20-2 is laminated and adhered. The ceramic spacer 30-2 is interposed in a side edge of the piece module 20-2 and the piece module 20-3 is laminated and adhered. The ceramic cap 30-T is laminated and adhered outside the piece module 20-3, an outer peripheral surface is assembled to a tube and the ceramic edge face board 35 is adhered to an opening part to constitute a bottomed tubular module. Since a main constituent composition is formed ceramics of the same material having heat conduction, heat dissipation can be improved. |