Press. monitoring arrangement, esp. for clean room areas - contains thermal anemometers in flow channel with separating flow obstruction, and signal processor

摘要

The pressure monitoring arrangement contains at least one measurement element which produces a signal corresp. to the pressure. The measurement elements (6,7) are thermal anemometers which are connected to a signal processing unit. A temp. compensation arrangement is associated with the anemometers. The measurement elements are arranged in a flow channel through which a medium is flowing, and are separated from each other by at least one flow obstruction protruding into the flow channel transversely to the flow direction and further than the anemometers. USE/ADVANTAGE - In clean rooms where wafers are handled and processed; measuring small pressure differences (<10 Pa). Accurate press. monitoring, can measure low pressure, e.g. down to 0.1 Pascals.