Anodization apparatus with supporting device for substrate to be treated.

摘要

A supporting device for a treated substrate (1), applicable to a formation tank in which a chemical treatment is effected on said treated substrate supported in a treating solution comprises: a sealing member (5) with elasticity for supporting said treated substrate in hermetic fit to a peripheral portion thereof except for a surface to be treated; a substrate support jig (4) for supporting said sealing member; means (7) for introducing a fluid of gas or liquid from the outside into a hollow portion in said substrate support jig so that a pressure of said fluid urges said sealing member against said peripheral portion except for the surface to be treated on said substrate to achieve hermetic fit therebetween; and means for changing said pressure to control a deformation amount of said sealing member and an urging force thereon.