| 摘要 |
PURPOSE:To obtain a piezoelectric material which shows little change with the elapse of time in the starting point of straing and the variation due to strain and shows little residual strain during voltage is not applied, by forming ceramic particles having specified average particle size or smaller after calculation and having a tetragonal crystalline structure. CONSTITUTION:This piezoelectric material for an actuator is obtd. by calculating ceramic particles with a binder. As for the source material, minute amts. of oxides of Sn, Nb and Zn are added to a PZT material and the proportion of Zr (mol% of Zr to the total amt. of Zr and Ti in the source material) is controlled to 49.0 to obtain a tetragonal crystalline structure. These source materials are indivisually prepared, mixed, pulverized and calcined. Then the material is finely pulverized into specified particle size, mixed with a binder, and then compacted. In this process, hot press method is used to control the particle size and to remove pores mixed in the material. Then the compacted material is fired to obtain a tetragonal piezoelectric ceramic material having <4mum average particle size, and preferably 2-4mum. |
