| 摘要 |
ELECTROSTATIC HOLDING APPARATUS An electrostatic holding apparatus having, in sequentially laminated relation, an insulating base layer, a set of electrodes to which positive and negative charges are respectively applied, and an adsorbing layer which is induced by the set of electrodes for attracting and holding an object thereagainst by an electrostatic attracting force. A power supply circuit is connected to the set of electrodes for respectively applying positive and negative charges to the first and second electrodes of the set. The power supply circuit includes a DC power source, and also includes a switching arrangement for permitting reversing of the charges as applied to the electrodes so that reverse charges are applied to the electrodes each time a prior object is peeled off the adsorbing layer and a new object is attached thereto.
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