| 摘要 |
<p>PURPOSE:To easily and efficiently remove the impurities contained in a rare gas by bringing the rare gas into contact with a getter material of the ternary alloy consisting of zirconium, vanadium and tungsten under heating. CONSTITUTION:A getter material 3 of the ternary alloy consisting of zirconium, vanadium and tungsten is filled in a purification cylinder 5, and a heater 4 is provided outside the cylinder 5. A crude rare gas feed pipe 6 is connected to an inlet 1 of the cylinder 5, and a cooling pipe 7 is connected to an outlet 2. The cylinder 5 is heated to a specified temp. by the heater 4, the crude rare gas (e.g. neon) is supplied to the cylinder 5 and brought into contact with the getter material 3, and the impurities in the rare gas are allowed to react with the getter material 3 and removed. The rare gas freed from the impurities is introduced into the cooling pipe 7, cooled, then discharged through a discharge pipe 8 and used to the purpose.</p> |
