PRODUCTION OF HIGH-PURITY WATER AND EQUIPMENT THEREOF

摘要

PURPOSE:To provide an equipment for producing high-purity water which is so improved that low-boiling point organic substance does not remain. CONSTITUTION:A vessel 2 is equipped wherein water to be treated is held and vaporized. A supply means 1 of water to be treated is fitted to the vessel 2 in order to supply water to be treated into the vessel. Water to be treated in the vessel 2 is heated by a heating means 3 and vaporized. Steam fed from the vessel 2 is cooled by a cooling means 4. Distilled water discharged from the cooling means 4 is irradiated with ultraviolet rays by an ultraviolet irradiation means 6. Organic decomposition substance contained in distilled water irradiated with ultraviolet rays is removed by a removing means 8 of the organic decomposition substance and high-purity water is obtained.