发明名称 ATTRACTING AND RETAINING DEVICE FOR THIN PLATE
摘要 PURPOSE:To favorably attract and retain a thin plate without deforming it over the deformable limit so as to prevent it from being broken by forming the surface of placement and the surface of mounting member in a specified form to meet the shape for attracting and retaining the thin plate. CONSTITUTION:A thin plate W is placed on the surface of a member on which it is placed 1 and negative pressure of a negative pressure source is generated under such a condition. Attraction action of an attraction hole 9 is then taken through a connection port 12, communication path 13 and passage gap 14 and the thin plate W is brought into close contact with the placement face and the surface 10 of the mounting member 7 and held. Since the surface 10 of the mounting member 7 is formed in the shape to meet the attracting and retaining shape for the thin plate W, attraction and retaining is carried out with the specified shape maintained.
申请公布号 JPH06134636(A) 申请公布日期 1994.05.17
申请号 JP19920309607 申请日期 1992.10.25
申请人 SUINKUSU:KK 发明人 SATO HIROSHI
分类号 B23Q3/08;H01L21/68;H01L21/683;H01L33/30 主分类号 B23Q3/08
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