摘要 |
PURPOSE:To favorably attract and retain a thin plate without deforming it over the deformable limit so as to prevent it from being broken by forming the surface of placement and the surface of mounting member in a specified form to meet the shape for attracting and retaining the thin plate. CONSTITUTION:A thin plate W is placed on the surface of a member on which it is placed 1 and negative pressure of a negative pressure source is generated under such a condition. Attraction action of an attraction hole 9 is then taken through a connection port 12, communication path 13 and passage gap 14 and the thin plate W is brought into close contact with the placement face and the surface 10 of the mounting member 7 and held. Since the surface 10 of the mounting member 7 is formed in the shape to meet the attracting and retaining shape for the thin plate W, attraction and retaining is carried out with the specified shape maintained. |