摘要 |
PURPOSE: To form a correction signal in accordance with the difference between pulse frequency signals generated by A/D-converting pulse widths and to use the signal in cooperation with multichannel pulse analysis for automatically correcting the align ment of pulse height distribution. CONSTITUTION: A gas ionization detector is used as an X-ray detector 6. The fluorescent X-ray beam 9 which is emitted from a sample 8 when an X-ray beam 7 is made incident to the sample 9 reaches the detector 6 through a collimator 3, an analyzing crystal 5, and a collimator 4. By rotating the crystal 5, the energy of the X-ray beam made incident to the detector 6 is selected within a narrow zone. The detector 6 is moved along a circular arc 15 by means of a motor 12. The amplitude of the analog signal generated from the detector 6 is controlled by means of a gain control circuit 6 and converted into a digital form by means of an A/D converter 17. The amplitude of the signal generated from the detector 6 coincides with the energy of the X-ray photon made incident to the detector 6. Therefore, the frequency distribution of the amplitude of the signal coincides with the energy distribution of the X-ray photon made incident to the detector 6. |