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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06132282(A)
申请公布日期
1994.05.13
申请号
JP19920278458
申请日期
1992.10.16
申请人
KAWASAKI STEEL CORP
发明人
NEGISHI HIROTAKA
分类号
H01L21/265;H01L21/316;H01L21/76;(IPC1-7):H01L21/316
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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