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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06132402(A)
申请公布日期
1994.05.13
申请号
JP19920283373
申请日期
1992.10.22
申请人
MATSUSHITA ELECTRON CORP
发明人
HIRANO HIROSHIGE
分类号
H01L21/82;H01L21/822;H01L27/04;H01L27/10;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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