| 摘要 |
PURPOSE:To easily connect an optical waveguide and an optical fiber array by observing a connecting part by means of a long focus stereoscopic microscope from diagonally above the optical fiber array and connecting the waveguide and the array upon confirmation that the visible rays on an incident side and exit side exist on a concentrical circle. CONSTITUTION:The waveguide 1 formed by providing an SiO2 clad layer on an Si substrate, constituting an 8-branch optical waveguide of TiO2-doped SiO2 and covering the upper part thereof with SiO2. An He-Ne laser output is made incident from the incident side of the waveguide and two pieces of optical fibers 5 at both ends of the optical fiber array 2 and the juncture is observed via quartz glass in the upper part of the optical fiber array 2 diagonally from above the optical fiber array 2 by the stereoscopic microscope 3. The respective axes of a fine adjustment base are finely adjusted while the rays emitted from two pieces of the optical fibers 5 at both ends of the optical fiber array 2 align to the spot in the waveguide part on the exit end face of the waveguide corresponding thereto on the concentrical circle. |
