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发明名称
WAFER ANALYZER
摘要
申请公布号
JPH06132376(A)
申请公布日期
1994.05.13
申请号
JP19920303302
申请日期
1992.10.16
申请人
MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP
发明人
KONDO HIDEYUKI;YANAGI SHIGENARI;TAKAHASHI TAKASHI
分类号
G01N1/02;G01N1/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01N1/02
代理机构
代理人
主权项
地址
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