| 摘要 |
<p>PURPOSE:To increase display quality and yield by preventing the inverted taper form of a connection hole opened in a second inter-layer insulating film from producing to prevent an image element electrode from breaking in a liquid crystal display device with two layers of interlayer insulating films formed on a transparent insulating substrate. CONSTITUTION:After connection holes 11 and 12 are opened in a first inter-layer insulating film 9 so that they are connected conductively to a source 2 and a drain 3 of a TFT, the connection hole 12 on the drain 3 side only is covered with a resist to form a data line 14. Accordingly, because the connection hole 12 on the drain 3 side is covered with the resist when a data line 14 is formed, there is no sputter damage on the first inter-layer insulating film 9, and a inverted taper form of the connection hole 11 opened in a second inter-layer insulating film 10 can be prevented from producing. Thus a picture element electrode 16 is prevented from breaking to increase display quality and yield.</p> |
