MANUFACTURE OF OPTICAL WAVEGUIDE COMPONENT

摘要

PURPOSE:To provide a method to form a guide groove for arranging an optical fiber to be connected to an optical waveguide on the same substrate without applying cutting work. CONSTITUTION:This method is the manufacture of an optical waveguide component in which the optical waveguide 2a is formed on a substrate 1, thence, a guide groove 4 is formed after forming a recessed groove 7 by eliminating the part of the substrate from the back plane 1a of the substrate 1 to the boundary area of the optical waveguide 2a and the guide groove 4 in a direction crossing orthogonally to the longitudinal direction of the optical waveguide 2a when an optical waveguide component in which the optical waveguide 2a and the guide groove 4 to arrange an optical fiber to be coupled with the optical waveguide 2a are formed on the same substrate 1 is manufactured.