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发明名称
EXPOSURE METHOD
摘要
申请公布号
JPH06132190(A)
申请公布日期
1994.05.13
申请号
JP19920284470
申请日期
1992.10.22
申请人
SHARP CORP
发明人
KAKIMOTO NORIKO
分类号
G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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