MANUFACTURE OF SILICON OXIDE FILM,申请号JP19920302962-传众专利搜索

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发明名称	MANUFACTURE OF SILICON OXIDE FILM
摘要
申请公布号	JPH06132281(A)	申请公布日期	1994.05.13
申请号	JP19920302962	申请日期	1992.10.15
申请人	SONY CORP	发明人	ARAKI SHINICHI
分类号	H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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