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发明名称
MANUFACTURE OF SEMICONDUCTOR PRODUCTION DEVICE AND SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06132234(A)
申请公布日期
1994.05.13
申请号
JP19920281815
申请日期
1992.10.20
申请人
KAWASAKI STEEL CORP
发明人
ONODA YASUO
分类号
H01L21/205;H01L21/22;H01L21/677;H01L21/68;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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