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发明名称
CVD EQUIPMENT
摘要
申请公布号
JPH06132231(A)
申请公布日期
1994.05.13
申请号
JP19920281316
申请日期
1992.10.20
申请人
HITACHI LTD
发明人
HOSHINO MASAKAZU;WATANABE TOMOJI
分类号
C23C16/46;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C16/46
代理机构
代理人
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