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经营范围
发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPH06132250(A)
申请公布日期
1994.05.13
申请号
JP19920301819
申请日期
1992.10.14
申请人
TOKYO OHKA KOGYO CO LTD;OKI ELECTRIC IND CO LTD
发明人
MINATO MITSUAKI;MATSUSHITA ATSUSHI;OMORI SHINICHI;KANAMORI JUN
分类号
C23F4/00;C23C16/507;H01J37/32;H01L21/302;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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