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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE BY POLISHING
摘要
申请公布号
JPH06132264(A)
申请公布日期
1994.05.13
申请号
JP19920282984
申请日期
1992.10.21
申请人
FUJITSU LTD
发明人
SUGIMOTO FUMITOSHI
分类号
H01L21/304;H01L21/02;H01L27/12;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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