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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH06132256(A)
申请公布日期
1994.05.13
申请号
JP19920284092
申请日期
1992.10.22
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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