| 摘要 |
PURPOSE:To lower the fraction defective of color filters by chemically dissolving and removing the residual film in the peripheral of an LCD color filter substrate without affecting pattern parts. CONSTITUTION:A substrate setting section 11 which perpendicularly sets the LCD color filter substrate 1, a section 21 for checking the inclination of the bottom side of the set substrate, a section 31 for immersing the bottom side of the substrate into a dilute alkaline liquid, a washing section 41 by spraying of pure water and a drying section 51 by blowing of clean air are juxtaposed. The color filter substrate 1 is successively transferred from the substrate setting section 11 to the respective sections by a substrate holding section 61, by which the residual film on the base side of the substrate is dissolved, washed and dried. |
