| 发明名称 |
DEVICE FOR MANUFACTURE SEMICONDUCTOR DEVICE |
| 摘要 |
<p>PURPOSE:To write chip attribute into each chip during diffusion process of a semiconductor device. CONSTITUTION:A mask 18 for writing chip attribute is installed at the upper or lower part of a blank part 14a of a mask 14 when transferring a mask pattern and the chip attribute is written into one part of the chip by exposure and projection directly using the mask 18.</p> |
| 申请公布号 |
JPH06132183(A) |
申请公布日期 |
1994.05.13 |
| 申请号 |
JP19920283371 |
申请日期 |
1992.10.22 |
| 申请人 |
MATSUSHITA ELECTRON CORP |
发明人 |
KOSHIBA KEIICHI |
| 分类号 |
H01L21/02;H01L21/027;H01L21/30;H01L21/68;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
