| 摘要 |
<p>PURPOSE:To enable mapping data to be quickly and accurately formed by a method wherein it is discriminated by comparing a processed image with a well-shaped pellet image that a pellet is well-shaped or ill-shaped, and discrimi nation results are arithmetically processed so as to be stored in a memory device corresponding to the column data and the row data of a wafer. CONSTITUTION:A mapping data forming device 10 successively takes in the pellet images of a wafer 1 through a recognition unit 13, the pellet images taken in through the recognition unit 13 are subjected to image processing through an image unit 14. The processed image is compared with a well-shaped pellet image previously set so as to discriminate a well-shaped pellet from an ill-shaped one, and the discrimination results are arithmetically processed so as to be stored in a memory device 16 corresponding to the column and the row data of the wafer 1.</p> |
