| 摘要 |
PURPOSE:To provide a displacement element capable of integrating and a cantilever type probe, which are used for a scanning tunnel microscope, an information processor and the like. CONSTITUTION:Pt or Pd is used as the material for each electrode of a displacement element formed by laminating a lower electrode 2, a first piezoelectric material film 3, a medium electrode 4, a second piezoelectric material film 5 and an upper electrode 6 on an Si single crystal substrate 1. Accordingly, as the internal stresses subsequent to the formation of the piezoelectric material films in electrode films formed of the materials for these electrodes are very small, there is no exfoliation of the interfaces between the piezoelectric material films and the electrode films, the displacement element capable of integrating can be provided at a high yield and a scanning tunnel microscope and an information processor, which use a cantilever type probe using the displacement element with a chip 7 provided thereon, are manufactured into a device, which is superior in reliability and stability. |
