| 摘要 |
<p>PURPOSE:To provide a field emission type electron source having a stable emission characteristic and capable of effectively suppressing the aging change of the cathode characteristic. CONSTITUTION:A substrate 1 is provided with an insulating layer 2 formed with a hole 7 and a conical emitter 3 in contact with the substrate 1 (or integrally with the substrate 1) at the center section of the hole 7 of the insulating layer 2. A cover film 4 made of a hard carbon film or a carbide layer is formed on the surface of the emitter 3. A controlling gate electrode 5 is provided on the face of the insulating layer 2 on the opposite side to the substrate 1, and an anode 6 is arranged above the gate electrode 5 at the preset interval from the emitter 3. Since the cover film made of the hard carbon film or the carbide layer is provided on the surface of the emitter 3, the atmospheric gas is hardly adsorbed to the emitter 3, and the stable emission characteristic can be obtained.</p> |
