| 摘要 |
PURPOSE:To improve the conversion efficiency while reducing the light loss in thin film semiconductor solar cells, by forming a plurality of rotating paraboloids having substantially the same focal distance on the surface of a substrate and focusing the rotating paraboloids in a thin film semiconductor layer. CONSTITUTION:A substrate 201 is formed into a surface shape having a continuously parabolic section 201c by a machining. A metal layer 202 and a transparent conductive layer 203 are sequentially deposited on the substrate 201 by a sputtering apparatus. A semiconductor layer 204 consisting of an a-Si layer 205, an i-type a-SiGe layer 206 and an a-Si layer 207 is formed on the transparent conductive layer 203. Next, an ITO film is deposited at a transparent electrode 208 by a resistance heating evaporation method. Further, collection electrodes 209 are formed on the transparent electrode 208 and solar cells are formed. Thus, light admitted into the semiconductor layer 204 can be focused on one point in the semiconductor layer 204 through the parabolic section 201c and the light loss can be reduced. |
