Process for forming negative tone images of polyimides using base treatment of crosslinked polyamic ester
摘要
The present invention relates to an improved process for forming negative tone images of photosensitive polyimides on a substrate having improved wall angles.
申请公布号
US5310625(A)
申请公布日期
1994.05.10
申请号
US19930101261
申请日期
1993.08.03
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ANGELOPOULOS, MARIE;BERGER, DANIEL G.;LABADIE, JEFFREY W.;PERFECTO, ERIC D.;SANCHEZ, MARTHA I.;SWANSON, SALLY A.;VOLKSEN, WILLI
