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发明名称
FLUIDIZED BED REACTOR FOR PRODUCING POLYCRYSTALLINE SILICON
摘要
申请公布号
JPH06127915(A)
申请公布日期
1994.05.10
申请号
JP19920304855
申请日期
1992.10.16
申请人
TONEN CHEM CORP;TOAGOSEI CHEM IND CO LTD
发明人
KOMATSU YOSHINORI;ISHII MASAAKI;TAKATSUNA KAZUTOSHI;SARUWATARI YASUHIRO;ISHIKAWA NOBUHIRO;HIROTA DAISUKE
分类号
C01B33/02;(IPC1-7):C01B33/02
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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