| 摘要 |
PURPOSE:To provide a heating device for reflow to enable regeneration and activation of the catalyst. CONSTITUTION:A heating unit 11 to heat the atmospheric gas for reflow consists of a sheath heater 12 and a permeable catalyst cylindrical body 13 in an integrated manner. In the sheath heater 12, the heating wire 22 is provided inside the cylindrical heater body 21, and the cylindrical catalyst body 13 is integratedly fitted with the outer circumferential surface of the heater body 21. The cylindrical catalyst body 13 is formed by coating the catalyst on the surface of the porous material (including the surface in the pores). A porous metallic plate where the Fe-Ni-Cr alloy is formed in the three dimensional net structure is used for the porous material. The catalyst is formed by coating platinum, Cu-Mn metal, palladium metal or the like on the porous material. |
