发明名称 Method and apparatus for optical testing of samples
摘要 Described are a method and apparatus for the optical testing of samples in which a camera records a plurality of images of an interferogram or a bar pattern. Phase values are determined for each image point of each camera record, and then differences between the phase values of adjacent points in each image line and column are computed in modulo 2 pi . These differences for each image point are summed over the plurality of camera images. After a number of images sufficient to assure desired accuracy have been summed, a single discontinuity elimination is carried out. This permits the rapid averaging of measurements over the plurality of camera images in real video time and remarkably reduces the measuring time and statistical errors.
申请公布号 US5311599(A) 申请公布日期 1994.05.10
申请号 US19910692127 申请日期 1991.04.26
申请人 CARL-ZEISS-STIFTUNG 发明人 FREISCHLAD, KLAUS
分类号 G01B11/02;G01B11/24;G01M11/00;G01N21/88;G01N21/93;G06T7/00;H04N7/18;(IPC1-7):G06K9/60;G06F15/70 主分类号 G01B11/02
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