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发明名称
POLISHING TOOL DEVICE AND POLISHING METHOD USING IT
摘要
申请公布号
JPH06126608(A)
申请公布日期
1994.05.10
申请号
JP19920284618
申请日期
1992.10.22
申请人
CANON INC
发明人
ANDO MANABU;TAKIMOTO MASAFUMI
分类号
B24B13/02;(IPC1-7):B24B13/02
主分类号
B24B13/02
代理机构
代理人
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