High precision stepping aligner having a spiral stepping pattern

摘要

A high precision stepping aligner includes a stage for carrying thereon an object and drivable to move the object stepwise relative to an exposing position so as to align a plurality of portions of the object in succession with the exposing position, where each of the portions is exposed to exposure light. The stage is moved stepwise first in the X-direction and then in the Y-direction. Thereafter, the stepping movement in the X-direction and the stepping movement in the Y-direction are repeated one after another so that the stage traces a substantially spiral stepping pattern. A mirror for reflecting a beam of light for positioning the stage is disposed on the stage with a heat insulating material interposed therebetween.