摘要 |
A piezoelectric transducer chip comprising a plurality of transducer elements. At least one of the transducer elements is a multi-layer element which comprises a plurality of piezoelectric layers, each of which is separated from the adjacent piezoelectric layers by an electrode layer so that a plurality of capacitive elements is electrically connected in parallel. The plurality of piezoelectric layers are comprised of a plurality of piezoelectric members separated from adjacent members by a gap to form a composite piezoelectric layer. Also disclosed is a method of making a multilayer transducer of a composite piezoelectric material. Alternate embodiments include two-dimensional ultrasonic transducer arrays having multilayer elements formed of a composite piezoelectric material. |