发明名称 SEED ROD CUTTING METHOD
摘要 PURPOSE:To provide a seed rod cutting method accurately detecting the crystal azimuth of a single crystal ingot being a material in order to obtain a seed crystal of good quality and capable of accurately controlling the cutting direction of the material on the basis of the detected crystal azimuth. CONSTITUTION:The outer periphery of a material is bonded to two surfaces of a jig 1 and the jig l is placed on the jig 2 placed and fixed on a jig 3 so that one side surface thereof is turned downwardly and the end surface of the material 4 is irradiated with K-rays at a Bragg angle by an X-ray diffraction device. At this time, four adjusting bolts 2e of the jig 2 are operated so that the intensity of a diffraction wave due to the detector 6 of the X-ray attraction device becomes max. to control the direction of the jig 1 and, thereafter, the jig 2 is fixed to the reference surface of a cutter to perform first cutting. Next, the jig 1 is placed on the jig 2 so that the other side surface thereof is turned downwardly and the end surface of the material is again irradiated with X-rays and the control bolts 2e are operated in the same way so that the intensity of the diffraction wave due to the detector 6 becomes max. to control the direction of the jig 1 and the jig 2 is fixed to the reference surface of the cutter to perform second cutting.
申请公布号 JPH06122119(A) 申请公布日期 1994.05.06
申请号 JP19920297761 申请日期 1992.10.09
申请人 KOMATSU DENSHI KINZOKU KK 发明人 KAGAWA TSUGIO
分类号 B28D7/02;B28D5/00;C30B33/00;G01N23/207;H01L21/304 主分类号 B28D7/02
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