| 摘要 |
<p>PURPOSE: To make a structure compact by arranging a scanning means for repeatedly scanning an object by a scanning beam formed by cyclically moving a laser beam and a laser beam generation means on a single substrate. CONSTITUTION: The substrate 10 is provided with a multi-layer structure 20, that is a part provided with a semiconductor laser diode, and the semiconductor laser diode generates the laser beam 25, emits it from the end face 26 of the multi-layer structure 20 and propagates it to a reflection structure 35. Then, when a reflection surface 27 provided on the upper surface of piezoelectric composite material layers 28 and 29 vapor-deposited on the substrate 10 is moved, the laser beam 25 is deflected and a scanning line for crossing the bar code symbol 31 of the object 32 is generated. In this case, the composite material layers 28 and 29 are composed of two piezoelectric material layers for responding to allowable electric signals. That is, a soft intermediate material layer 34 is accumulated on the surface of the substrate 10 and the piezoelectric material layers 28 and 29 respectively connected to electrodes V1 and V2 are accumulated on it. Then, the intermediate material layer 34 allows the mutual movement of the piezoelectric material layers 28 and 29 without transmitting stress to the substrate 10.</p> |
